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PI: Nick McGruer
Authors: Juan Carlos Aceros, G.G. Adams*, N.E. McGruer, and S. Muftu*
Presenters: Juan Carlos Aceros
Primary Contact: Juan Carlos Aceros
Primary Contact’s E-mail: jaceros@coe.neu.edu
Primary Contact’s Phone: (617) 373-3518
Characterization of Nanowires Using MEMS
The manufacturing of nanodevices requires a good understanding of the mechanical and electrical properties of nanowires. The required sizes of nanowires range from 10nm to 100nm. This range has not been previously studied due to the difficulty of experimental testing. In this research, a MEMS-based test bed is employed as a tool for measuring these properties. Some of the test bed devices measure electrical properties while defects are mechanically or thermally induced on the nanowire. With these devices accelerated testing of the nanowires can be performed. Other devices measure the elastic and plastic properties of the nanowire while recording their electrical behavior. Electromigration, electrical inhomogeneitis and mechanical failure are some of the effects studied. The devices are UHV compatible therefore allowing in-situ, real time measuring of the defect development.