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PI: Prof. G.G. Adams
Authors: Peter Ryan, G.G. Adams, S. Muftu, Nicol McGruer*, Northeastern University, College of Engineering,Dept. of Mechanical & Industrial Engineering, Dept. of Electrical & Computer Engineering*
Presenters: Peter Ryan
Primary Contact: Peter Ryan
Primary Contact’s E-mail: findingpeterryan@hotmail.com
Primary Contact’s Phone: 781-789-3089

Nano-mechanical Testing

As the direction of technology heads towards producing products that operate at smaller and smaller length scales, there exists a need to develop new methods of mechanically testing materials at these scales. Current methods include two classes- test beds consisting of fabricated devices integrated with testing instruments (such as Micro-Electro-Mechanical Systems (MEMS) devices), and instruments such as micro- and nano-indenters in which the mechanical tester is separate from the material to be tested. The first class of mechanical testers has practical as well as materials limitations. A sample of the material needs to be fabricated as part of the overall fabrication process, thus constraining the choice of materials to be compatible with the fabrication process. The second class of testers allows for better variability of materials, but is best suited to measure mechanical properties at the surface of the material, such as hardness and elastic modulus.

In this investigation, nano-mechanical test structures (cantilevers and bridges) were fabricated from Chromium with a minimum length scale of 50 nm. A method was developed, using an Atomic Force Microscope (AFM), for mechanical testing by scanning these structures under different levels of loading. The resulting data was then interpreted and mechanical properties deduced. Future investigations should enable smaller structures to be fabricated and tested using a variety of test materials.