Nano facilities
George J.Kostas Nanoscale Technology and Manufacturing Center
The George J. Kostas Nanoscale Technology and Manufacturing Center Facility serves as the main facility for the NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (CHN) at Northeastern University, in partnership with the University of Massachusetts Lowell, and the University of New Hampshire. Established through a generous gift from alumnus George J. Kostas '43, the Nanoscale Technology and Manufacturing Center opened in 2005.
The facility includes 5,000 square feet of class 10/100 cleanroom space with 6” wafer MEMs fabrication facilities, including modern lithography, etch, thin film, and plating capabilities for 3 and 6 inch substrates, as well as supercritical CO2 release and a full range of process and electrical test instruments. Sub-100 nm lithography is available using a J.C. Nabity Nanometer Pattern Generation System coupled with a JEOL SEM. New equipment incorporated into the Kostas Center includes a Field Emission Scanning Electron Microscope with e-beam lithography capability, a precision alignment nanoimprint lithography system, a Multimode SPM and Nanomanipulator AFM System, and a surface energy analysis system. Microcontamination equipment includes a KLA-Tencor Laser surface scanner (200 nm resolution), two TSI CNC particle counters (10 nm resolution), a Goniometer, four Megasonic and two ultrasonic cleaning stations, a TSI particle classifier, and a Bond Tester.
In addition to the research laboratories, there is an area designated for undergraduate and graduate student teams working on projects with corporate partners. The facility, which is open to faculty, students, researchers, co-op students, and external users, provides support and materials based on user fees.
Nanmaterials Instrument Facility
The Electronic Materials Research Institute provides the Nanomaterials Instrument Facility for materials research in nanotechnology and biotechnology. The principal facilities are available on a fee-for-service or collaborative basis. Please visit www.emri.neu.edu/facilities for contact information. Approximately 15,000 sq ft of modern laboratory space includes a variety of special instrumentation and unique laboratory set-ups including:
- High-resolution Field-emission SEM
- Electron Microscopy Center
- TEM - JEOL JEM-1000 general purpose transmission electron microscope.
- SEM - AMRAY AMR-1000 scanning electron microscope
- Scanning Nanoprobes
- Atomic Force, scanning-tunneling, and near-field optical microscopes (AFM, STM, NSOM)
- AFM - Quesant Instruments Q-Scope 250 for room temperature operation. A Dektak-3 ST profilometer is also available as a user facility.
- STM/AFM - RHK Model UHV 350, operating from 100-500 K in ultra-high vacuum.
- Scanning Optical Nanoprobe
- Nanonics NSOM/SPM-100 near-field, scanning optical microscope with liquid helium temperature stage.
- X-Ray Diffraction
- A Philips X'pert PRO PW3040/60 general purpose x-ray diffractometer that can be used for phase identification, structure analysis, and thin-film analysis via glancing incident angle.
- SQUID Magnetometer
- Quantum Design MPMS XL-5 SQUID magnetometer, with 5T maximum field, 10-8 emu relative sensitivity, AC susceptibility, vertical rotator, EverCool Dewar, and optical access.
- Microfabrication Laboratory
- Auger, RHEED, particle sizer, electrochemical workstation, Zeta potentiometer, magneto conductivity (T>20mK, 9T), magneto-optics (9T,14 T), FTIR, Raman scattering, microwave apparatus, dielectometer. KLA-Tencor Laser surface scanner (200 nm resolution), Two TSI CNC particle counters (10 nm resolution), goniometer, Nikon optical microscope system with auto-focus and an automated stage (1500x), four Megasonic and two Ultrasonic cleaning stations, Headway Research Spinner, TSI particle classifier, bond tester, electrochemical work stations, particle size analyzer.